Title :
Nano electromechanical transducer based on single walled carbon nanotubes
Author :
Stampfer, Christoph ; Jungen, A. ; Hierold, C.
Author_Institution :
Dept. of Micro & Nanosyst., ETH Zurich, Switzerland
Abstract :
We report on the fabrication and characterization of a nanometer-scale electromechanical transducer based on individual single walled carbon nanotubes (SWNTs). Each nano electro-mechanical device incorporates one electrically connected and suspended SWNT (d ∼ 1nm), which is placed underneath a freestanding 200 nm wide metal (2nm Cr and 30-50nm Au) cantilever. We present mechanical and electromechanical measurements of the cantilever based device and show that the resistance of the SWNT changes significantly by a factor of approximately 3 when slightly deflecting the Au cantilever by 40nm.
Keywords :
carbon nanotubes; micromechanical devices; nanotechnology; transducers; 1 nm; 2 nm; 200 nm; 30 to 50 nm; NEMS; electromechanical measurements; mechanical measurement; nano electromechanical transducer; nanomechanics; nanosensors; single walled carbon nanotubes; Atomic force microscopy; Carbon nanotubes; Chemical elements; Fabrication; Force sensors; Gold; Nanoelectromechanical systems; Nanoscale devices; Semiconductivity; Transducers;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1497518