Title :
Sensitive measurement of surface resistance of conductive films using dielectric resonator
Author_Institution :
Nat. Key Lab. of Electron. Meas. Technol., CETC, Qingdao
Abstract :
Two measurement systems for microwave surface impedance of conductive thin films were presented The advantage and disadvantage of the measurement systems were discussed. The structure of measurement was first designed.
Keywords :
dielectric resonators; electric resistance measurement; microwave measurement; surface resistance; thin films; conductive thin films; dielectric resonator; microwave surface impedance; sensitive measurement; surface resistance; Conductive films; Conductivity measurement; Dielectric films; Dielectric measurements; Dielectric thin films; Electrical resistance measurement; Impedance measurement; Microwave measurements; Surface impedance; Surface resistance;
Conference_Titel :
Microwave and Millimeter Wave Technology, 2008. ICMMT 2008. International Conference on
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-1879-4
Electronic_ISBN :
978-1-4244-1880-0
DOI :
10.1109/ICMMT.2008.4540471
