Title :
Fabrication Of Ultrasonic Sensor Using Silicon Membrane
Author :
Inoue, Kohji ; Suzuki, Yoshihiko ; Ogawa, Souichi
Keywords :
Anisotropic magnetoresistance; Biomembranes; Etching; Fabrication; Glass; Mechanical sensors; Sensor phenomena and characterization; Silicon; Textile industry; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721907
