Title :
Optimization Of Micromachined Ultrasound Transducer By Finite Element Simulation
Author :
Hornung, M. ; Brand, O. ; Baltes, H.
Keywords :
Biomembranes; Etching; Fabrication; Finite element methods; Resonance; Resonant frequency; Silicon; Textile industry; Ultrasonic imaging; Ultrasonic transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721908
