Title :
A Bulk-micromachined 1024-element Uncooled Infrared Imager
Author :
Oliver, Andrew D. ; Baer, Wayne G. ; Wise, Kensall D.
Keywords :
Circuits; Infrared detectors; Infrared heating; Infrared imaging; Packaging; Photonic band gap; Pixel; Process control; Silicon; Temperature sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721912
