Ring resonator adopting multimode waveguide turning mirrors

Author

Chiu, C.L. ; Lay, T.S. ; Chang, T.Y.

Author_Institution

Inst. of Electro-Opt. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung

fYear

2008

fDate

25-29 May 2008

Firstpage

1

Lastpage

3

Abstract

The characteristic response of In_0.532Ga_0.468As/In_0.528Ga_0.257Al_0.215As on InP single ring resonators in the form of race tracks with a radius of 260(15⁰), 110(60⁰) and 260(15⁰) mum are presented. The used 2times2 multimode interference (MMI) couplers with coupling factor 0.85 are as short as 128 mum. Deep etching vertical mirror was used in the middle of MMI crossing. The free spectral ranges of 83 GHz and the through output (max)-drop (min) ratio of 21 dB have been achieved for the single ring resonator.

Keywords

III-V semiconductors; aluminium compounds; etching; gallium arsenide; indium compounds; integrated optics; micro-optomechanical devices; micromechanical resonators; micromirrors; optical couplers; optical resonators; optical waveguides; 2times2 multimode interference couplers; In_0.532Ga_0.468As-In_0.528Ga_0.257Al_0.215As; deep etching vertical mirror; free spectral ranges; frequency 83 Hz; multimode waveguide turning mirrors; race tracks; single ring resonators; throughtput-drop ratio; Etching; Fabrication; Indium phosphide; Mirrors; Optical filters; Optical resonators; Optical ring resonators; Optical waveguides; Resonator filters; Turning; Optical resonators; Semiconductor; Wavelength filtering devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Indium Phosphide and Related Materials, 2008. IPRM 2008. 20th International Conference on

Conference_Location

Versailles

ISSN

1092-8669

Print_ISBN

978-1-4244-2258-6

Electronic_ISBN

1092-8669

Type

conf

DOI

10.1109/ICIPRM.2008.4702905

Filename

4702905