Title :
Fabrication Of A Silicon Micromachined Capacitive Microphone Using A Dry-etch Process
Author :
Ning, Y.B. ; Mitchell, A.W. ; Tait, R.N.
Keywords :
Aluminum; Biomembranes; Fabrication; Microphones; Silicon; Solid state circuits; Sputter etching; Tensile stress; Transducers; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721929
