• DocumentCode
    1815201
  • Title

    Diamond-like photonic crystals by holographic lithography

  • Author

    Turberfield, A.J.

  • Author_Institution
    Clarendon Lab., Oxford Univ., UK
  • fYear
    2001
  • fDate
    11-11 May 2001
  • Firstpage
    13
  • Abstract
    Summary form only given. Holographic lithography is a general and flexible technique for the fabrication of three-dimensional photonic crystals. Three-dimensional microstructure is generated when a four-beam laser interference pattern is used to expose a thick layer of photoresist. Highly exposed regions in the resulting three-dimensional intensity grating are rendered insoluble; unexposed areas are then dissolved away to produce a three-dimensional photonic crystal formed of cross-linked polymer with air-filled voids. The polymeric structure may be used as a template for the production of photonic crystals with higher refractive index contrast. This technique is particularly well adapted to the production of structures with the sub-micron periodicity required for applications in the visible optical spectrum.
  • Keywords
    holography; laser beams; light interference; optical polymers; photonic band gap; photoresists; 3D microstructure; 3D photonic crystals; air-filled voids; cross-linked polymer; diamond-like photonic crystals; four-beam laser interference pattern; highly exposed regions; holographic lithography; photoresist; polymeric structure; sub-micron periodicity; thick layer; three-dimensional intensity grating; Gratings; Holography; Interference; Lithography; Microstructure; Optical device fabrication; Photonic crystals; Polymers; Production; Resists;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Quantum Electronics and Laser Science Conference, 2001. QELS '01. Technical Digest. Summaries of Papers Presented at the
  • Conference_Location
    Baltimore, MD, USA
  • Print_ISBN
    1-55752-663-X
  • Type

    conf

  • DOI
    10.1109/QELS.2001.961783
  • Filename
    961783