• DocumentCode
    1815504
  • Title

    Excimer lasers for micromachining

  • Author

    Harvey, E.C. ; Rumsby, P.T. ; Gower, M.C. ; Mihailov, S. ; Thomas, D.

  • fYear
    1994
  • fDate
    34382
  • Firstpage
    42370
  • Lastpage
    42373
  • Abstract
    The authors discuss the problem of the design of the optical beam delivery system in excimer laser micromachining. The authors´ solutions are described and examples of machining structures and shaped holes, for a large variety of products, are presented
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Microengineering and Optics, IEE Colloquium on
  • Conference_Location
    London
  • Type

    conf

  • Filename
    286145
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1815504