Title :
Curriculum development in control of semiconductor manufacturing under an NSF combined research-curriculum grant
Author :
Khargonekar, Pramod P. ; Terry, Fred L., Jr.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
In this paper, we describe our NSF sponsored research-curriculum program devoted to the topic of modeling and control of semiconductor manufacturing. The paper is focused for the most part on the curriculum development under this program
Keywords :
educational courses; production control; semiconductor device manufacture; NSF; curriculum development; modeling; production control; research-curriculum program; semiconductor manufacturing; Curriculum development; Feedback control; Manufacturing processes; Microelectronics; Plasma applications; Plasma chemistry; Plasma materials processing; Process control; Semiconductor device manufacture; Virtual manufacturing;
Conference_Titel :
Decision and Control, 1999. Proceedings of the 38th IEEE Conference on
Conference_Location :
Phoenix, AZ
Print_ISBN :
0-7803-5250-5
DOI :
10.1109/CDC.1999.831398
