DocumentCode
1817553
Title
PMMA photonic crystals for waveguiding applications
Author
Dragoman, Daniela ; Dinescu, Adrian ; Müller, Raluca ; Kusko, Cristian ; Herghelegiu, Alex ; Kusko, Mihai
Author_Institution
Nat. Inst. for R&D in Microtechnologies
Volume
1
fYear
2008
fDate
13-15 Oct. 2008
Firstpage
85
Lastpage
88
Abstract
This paper describes the fabrication of two- dimensional photonic crystals (PCs) obtained by direct patterning of positive PMMA electronoresist, using the electron-beam lithography technique (EBL). We design, fabricate and simulate a passive optical structure: a channel PC waveguide, to be used in integrated optic applications. The fabrication of the device is a challenge because we integrated the PC waveguide configuration with a taper optical waveguide on the same substrate. The finite difference time domain (FDTD) simulations were used to predict the optical behavior, and in particular the band gap, of the investigated structure.
Keywords
optical waveguides; photonic crystals; 2D photonic crystals; FDTD; PMMA photonic crystals; channel PC waveguide; direct patterning; electron-beam lithography technique; finite difference time domain simulations; integrated optic applications; optical waveguide; passive optical structure; positive PMMA electronoresist; waveguiding applications; Finite difference methods; Integrated optics; Lithography; Optical design; Optical device fabrication; Optical devices; Optical waveguides; Personal communication networks; Photonic crystals; Time domain analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2008. CAS 2008. International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4244-2004-9
Type
conf
DOI
10.1109/SMICND.2008.4703333
Filename
4703333
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