• DocumentCode
    1817553
  • Title

    PMMA photonic crystals for waveguiding applications

  • Author

    Dragoman, Daniela ; Dinescu, Adrian ; Müller, Raluca ; Kusko, Cristian ; Herghelegiu, Alex ; Kusko, Mihai

  • Author_Institution
    Nat. Inst. for R&D in Microtechnologies
  • Volume
    1
  • fYear
    2008
  • fDate
    13-15 Oct. 2008
  • Firstpage
    85
  • Lastpage
    88
  • Abstract
    This paper describes the fabrication of two- dimensional photonic crystals (PCs) obtained by direct patterning of positive PMMA electronoresist, using the electron-beam lithography technique (EBL). We design, fabricate and simulate a passive optical structure: a channel PC waveguide, to be used in integrated optic applications. The fabrication of the device is a challenge because we integrated the PC waveguide configuration with a taper optical waveguide on the same substrate. The finite difference time domain (FDTD) simulations were used to predict the optical behavior, and in particular the band gap, of the investigated structure.
  • Keywords
    optical waveguides; photonic crystals; 2D photonic crystals; FDTD; PMMA photonic crystals; channel PC waveguide; direct patterning; electron-beam lithography technique; finite difference time domain simulations; integrated optic applications; optical waveguide; passive optical structure; positive PMMA electronoresist; waveguiding applications; Finite difference methods; Integrated optics; Lithography; Optical design; Optical device fabrication; Optical devices; Optical waveguides; Personal communication networks; Photonic crystals; Time domain analysis;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2008. CAS 2008. International
  • Conference_Location
    Sinaia
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4244-2004-9
  • Type

    conf

  • DOI
    10.1109/SMICND.2008.4703333
  • Filename
    4703333