Title :
Electrostatic servo system for multi-axis accelerometers
Author :
Jono, Keiji ; Hashimoto, Masato ; Esashi, Masayoshi
Author_Institution :
Fac. of Eng., Tohoku Univ., Sendai, Japan
Abstract :
A multi-axis capacitive accelerometer, using an electrostatic servo system was developed. In this system, an acceleration in three axes (X,Y,Z) is decomposed into its axial components independently and simultaneously by using the synchronous demodulation. The problem of off-axis response was solved by using the electrostatic force balancing to keep the seismic mass in the original position. Typical results achieved for off-axis sensitivity were 1.3-7.3%
Keywords :
accelerometers; electrostatic force balancing; electrostatic servo system; multi-axis accelerometers; off-axis response; off-axis sensitivity; seismic mass; synchronous demodulation; Acceleration; Accelerometers; Capacitance; Capacitors; Dynamic range; Electrodes; Electrostatics; Frequency; Piezoresistance; Servomechanisms;
Conference_Titel :
Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on
Conference_Location :
Oiso
Print_ISBN :
0-7803-1833-1
DOI :
10.1109/MEMSYS.1994.555762
