DocumentCode
1817702
Title
EC recycling technology for chemical reduction and energy saving in semiconductor or FPD fabrications
Author
Moon, Seho ; Gweon, Minhyeon ; Kim, Byeongho ; Kim, Hogil ; Chai, Sanghoon
Author_Institution
Dept. of Electron. Eng., Hoseo Univ., Asan, South Korea
fYear
2010
fDate
19-20 June 2010
Firstpage
24
Lastpage
26
Abstract
We have developed ethylene carbonate recycling process and system for chemical reduction and energy saving on photo-resist stripping and cleaning process, which will be a core process technology to get high performance and low price in semiconductor or FPD fabrications. Using this novel technology it is possible for the semiconductor wafer and FPD planer to process with low cost, and also there will be improvement of environmental pollution.
Keywords
carbon compounds; cleaning; pollution; recycling; semiconductor device manufacture; FPD fabrications; FPD planer; chemical reduction; cleaning process; core process technology; energy saving; environmental pollution; ethylene carbonate recycling process; ethylene carbonate recycling system; photo-resist stripping; semiconductor wafer; Pollution; Solids;
fLanguage
English
Publisher
ieee
Conference_Titel
Advances in Energy Engineering (ICAEE), 2010 International Conference on
Conference_Location
Beijing
Print_ISBN
978-1-4244-7831-6
Type
conf
DOI
10.1109/ICAEE.2010.5557624
Filename
5557624
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