Title :
Analysis of space charge effects due to ESD in MEMS
Author :
Greason, William D.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Western Ontario, London, ON, Canada
Abstract :
Models are developed to study the effect of charge injection due to ESD in capacitive MEMS structures. These models enable the calculation of electric field and potential due to volume charge distributions in the air gap. Implications on the operation of MEMS structures are discussed.
Keywords :
air gaps; charge injection; electric field effects; electrostatic discharge; micromechanical devices; space charge; ESD; air gap; capacitive MEMS structures; charge injection effect; electric field; space charge effect analysis; volume charge distributions; Atmospheric modeling; Dielectrics; Electric fields; Electric potential; Electrostatic discharge; Micromechanical devices; Voltage control;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2011 33rd
Conference_Location :
Anaheim, CA
Electronic_ISBN :
Pending
