Title :
Practical application of statistical process control in semiconductor manufacturing
Author_Institution :
StorageTek, Louisville, CO, USA
Abstract :
The application of statistical process control to semiconductor processes is hampered by the complexity of the processes. This paper aims to show intuitively how SPC can be utilized to prevent defects in a manufacturing environment through monitoring of supplier processes
Keywords :
VLSI; inspection; integrated circuit testing; production testing; semiconductor technology; statistical process control; SPC; complexity; defects prevention; functional tests; manufacturing environment; monitoring of supplier processes; semiconductor manufacturing; statistical process control; streamlining; Assembly; Design engineering; Feedback; Manufacturing processes; Monitoring; Performance evaluation; Process control; Pulp manufacturing; Semiconductor device manufacture; Testing;
Conference_Titel :
Test Conference, 1993. Proceedings., International
Conference_Location :
Baltimore, MD
Print_ISBN :
0-7803-1430-1
DOI :
10.1109/TEST.1993.470713
