• DocumentCode
    1828207
  • Title

    Automated wafer lot approval: A statistically based implementation

  • Author

    Milne, Kurt A.

  • Author_Institution
    Hewlett Packard Co., Ft. Collins, CO, USA
  • fYear
    1993
  • fDate
    17-21 Oct 1993
  • Firstpage
    92
  • Lastpage
    98
  • Abstract
    A statistical process control (SPC) based tool for automated wafer lot approval has been developed and successfully implemented. This paper detail the prerequisites implemented prior to automated wafer lot approval, discuss the statistical methods and software implementation used to automate the disposition of each wafer, and present a study of that tool´s approval effectiveness on two products; one with low test yield variance and one with high test yield variance. Due to the mixed results of the initial implementation, additional methods of increasing the approval effectiveness are detailed
  • Keywords
    automatic testing; integrated circuit testing; integrated circuit yield; production testing; statistical process control; SPC; automated wafer lot approval; statistical process control; test yield variance; Automatic testing; Data engineering; Databases; Error analysis; Error correction; Process control; Production; Standards development; Statistical analysis; Tires;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Test Conference, 1993. Proceedings., International
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    0-7803-1430-1
  • Type

    conf

  • DOI
    10.1109/TEST.1993.470714
  • Filename
    470714