Title :
Contact Resistance in Flat Thin Films
Author :
Read, M.B. ; Lang, J.H. ; Slocum, A.H. ; Martens, R.
Keywords :
Contact resistance; Electric resistance; Electrical resistance measurement; Force measurement; Geometry; Mechanical engineering; Micromechanical devices; Surface resistance; System testing; Transistors;
Conference_Titel :
Electrical Contacts, 2009 Proceedings of the 55th IEEE Holm Conference on
Conference_Location :
Vancouver, British Columbia, Canada
Print_ISBN :
978-1-4244-3613-2
Electronic_ISBN :
978-1-4244-3613-2
DOI :
10.1109/HOLM.2009.5284385
