Modeling and simulation of micro electromechanical (MEM) beam resonator-based oscillators

A micro electromechanical beam resonator model that accounts for electrostatic and mechanical non-linearities is proposed. Simulation results are shown to be well matched to fabricated device measurements, capturing non-linear effects such as resonant frequency shifting and the Duffing behavior. Simulations of a MEM resonator-based electronic oscillator using the proposed model show phase noise characteristics which are not predicted by linear models. This offers valuable insights in the trade-offs involved in the design optimization of these oscillators, especially when combined with automatic gain control mechanisms.