DocumentCode :
1838186
Title :
Dynamic simulator for WIP analysis in semiconductor manufacturing
Author :
Collins, Donald W. ; Lakshman, Vijay ; Collins, Luc D´Arcy
Author_Institution :
Arizona State Univ. East, Mesa, AZ, USA
fYear :
2001
fDate :
2001
Firstpage :
71
Lastpage :
74
Abstract :
We present a FAB Simulator (FS) and Capacity Planner (CP) that permits the operational planner to introduce new product into an existing production mix with confidence as to the customer delivery dates and FAB Capacity This paper describes the implementation of these two dynamic tools in a semiconductor FAB in Arizona. These tools assist the operational planner with the planning of the daily production mix. This FAB produces 100´s of different bipolar devices using 36 process flows. The key to success in calculating present and future production goals is real time operational level tracking. Real time tracked data includes data gathered from the Manufacturing Execution System (MES) for each product´s work-in-process (WIP), process flow routing, and data gathered from the equipment utilization and emergency maintenance databases. This key information is fed through a GUI linked to the CP which in turn controls the stochastic dynamic simulation model of the FS. These links provide the operational planner with dynamic production data in real time and simulated time for decision-making. The CP and FS are running in parallel and are linked directly with the FAB´s MES maintaining current production data
Keywords :
computer aided production planning; integrated circuit yield; manufacturing resources planning; production control; semiconductor process modelling; simulation; FAB simulator; GUI; WIP analysis; capacity planner; cycle time; daily production mix; decision-making; dynamic production data; dynamic simulator; dynamic tools; emergency maintenance database; manufacturing execution system; operational planning; process flow routing; semiconductor manufacturing; stochastic dynamic simulation model; Analytical models; Databases; Graphical user interfaces; Manufacturing processes; Production planning; Real time systems; Routing; Semiconductor device manufacture; Stochastic processes; Virtual manufacturing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing Symposium, 2001 IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-6731-6
Type :
conf
DOI :
10.1109/ISSM.2001.962917
Filename :
962917
Link To Document :
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