• DocumentCode
    1840331
  • Title

    Session 9: Metallization

  • fYear
    2005
  • fDate
    6-8 June 2005
  • Firstpage
    183
  • Lastpage
    183
  • Abstract
    Start of the above-titled section of the conference proceedings record.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Interconnect Technology Conference, 2005. Proceedings of the IEEE 2005 International
  • Conference_Location
    Burlingame, CA, USA
  • Print_ISBN
    0-7803-8752-X
  • Type

    conf

  • DOI
    10.1109/IITC.2005.1499972
  • Filename
    1499972
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1840331