Intra-chip optical interconnects with compact and low-loss light distribution in silicon-on-insulator rib waveguides

Author

Cassan, Eric ; Lardenois, S. ; Pascal, D. ; Vivien, Laurent ; Heitzmann, M. ; Bouzaida, N. ; Mollard, L. ; Orobtchouk, R. ; Laval, S.

Author_Institution

Inst. d´´Electron. Fondamentale, Univ. Paris-Sud, Orsay, France

fYear

2003

fDate

2-4 June 2003

Firstpage

39

Lastpage

41

Abstract

We report in this paper experimental and theoretical results showing that sub-micrometric rib (partially-etched) waveguides on silicon-on insulator (SOI) substrates can be used to achieve a low-loss and compact light distribution for on-chip interconnects in spite of the relatively low light confinement of this kind or waveguides. If compared with on-chip light distribution using SOI strip waveguides (fully-etched), this solution presents advantages such as minimal losses and minimal crosstalk between overlapping perpendicular waveguides.

Keywords

integrated optoelectronics; optical interconnections; optical waveguides; rib waveguides; silicon-on-insulator; SOI strip waveguides; Si; etching; intra chip optical interconnects; on-chip interconnects; on-chip light distribution; rib waveguides; silicon-on-insulator; Crosstalk; Insulation; Optical interconnections; Optical waveguide components; Optical waveguide theory; Optical waveguides; Silicon on insulator technology; Strips; Waveguide components; Waveguide theory;

fLanguage

English

Publisher

ieee

Conference_Titel

Interconnect Technology Conference, 2003. Proceedings of the IEEE 2003 International

Print_ISBN

0-7803-7797-4

Type

conf

DOI

10.1109/IITC.2003.1219706

Filename

1219706