• DocumentCode
    1847486
  • Title

    Influence of the Substrate Resistivity on the Broadband Propagation Characteristics of Silicon Transmission Lines

  • Author

    Arz, Uwe ; Grabinski, Hartmut ; Williams, Dylan F.

  • Author_Institution
    Laboratorium fÿr Informationstechnologie, Universitÿt Hannover Schneiderberg 32, D-30167 Hannover, Germany Ph: [+49]511.762.5056 E-mail: uarz@lfi.uni-hannover.de
  • Volume
    36
  • fYear
    2000
  • fDate
    Dec. 2000
  • Firstpage
    65
  • Lastpage
    70
  • Abstract
    This work investigates the broadband propagation characteristics of transmission lines fabricated on silicon substrates of different conductivities. We compare calculations to measurements and examine the sensitivity of the frequency-dependent line parameters to substrate conductivity.
  • Keywords
    Capacitance; Conductivity; Dielectric substrates; Frequency measurement; Inductance; Laboratories; NIST; Silicon; Skin effect; Transmission lines;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    ARFTG Conference Digest-Spring, 54th
  • Conference_Location
    Atlanta, GA, USA
  • Print_ISBN
    0-7803-5686-1
  • Type

    conf

  • DOI
    10.1109/ARFTG.1999.327364
  • Filename
    4120066
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1847486