DocumentCode
1849229
Title
Recent trends in optical MEMS for telecommunication applications
Author
Khalil, Diaa
fYear
2004
fDate
38111
Firstpage
56
Lastpage
81
Abstract
Recent progress in the development of the optical micro-electro-mechanical systems (MEMS) is reviewed with emphasis on their applications in the field of telecommunications. Both the scientific and the industrial aspects of the components are considered. Different structures are reported and, when necessary, briefly explained showing the main difficulties in development as well as state of the art performance. The possibility of industrialization has gained special interest in our discussion.
Keywords
micromachining; micromechanical devices; optical attenuators; optical communication equipment; optical filters; optical switches; industrial aspects; industrialization; optical MEMS; optical micro-electro-mechanical systems; scientific aspects; telecommunication applications; Microelectromechanical systems; Micromechanical devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics and Its Application, 2004. The Fourth Workshop on
Print_ISBN
977-5031-78-8
Type
conf
DOI
10.1109/PAIA.2004.1353817
Filename
1353817
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