Title :
Sensitivity Analysis of Calibration Standards for SOLT and LRRM
Author :
Safwat, Amr M E ; Hayden, Leonard
Author_Institution :
Cascade Microtech Inc., 2430 NW 206th Avenue, Beaverton OR 97006, USA, Email: asafwat@cmicro.com, Fax: 503 601 1601
Abstract :
We investigate the sensitivity of SOLT and LRRM on wafer calibrations to probe positioning. Calibration comparison derived error-bounds were calculated for data sets differing only by a single change in probe/standard overlap. The SOLT calibration was found to be significantly more sensitive to probe placement variations, consistent with theoretical predictions.
Keywords :
Calibration; Delay; Error analysis; Impedance; Measurement standards; Probes; Reproducibility of results; Sensitivity analysis; Standards development; Testing;
Conference_Titel :
ARFTG Conference Digest-Fall, 58th
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-5686-1
DOI :
10.1109/ARFTG.2001.327488
