The research of designing technology for microelectromechanical filter

Microelectromechanical filters with high Q value, good signal-to-noise ratio, and stable temperature and aging characteristics are widely used in the communication system and other electronic device. It is a special filter using its resonators´ vibrating intrinsic frequency to filter. Microelectromechanical systems have potential application for microelectromechanical filter. This paper analyzed the microelectromechanical filter resonators and investigate its work principle. In this paper, the design of micromechanical filter is introduced, and related key techniques are discussed. The parameters of the structure designed are calculated.