Direct pick, break, and placement of nanostructures and their integration with MEMS

A direct, simple, and versatile assembly method for the manipulation of one-dimensional nanostructures and their integration with MEMS has been demonstrated. Using common MEMS equipment - an optical microscope and an unbiased tungsten probe - the facile process has been employed to accurately manipulate titanium dioxide nanoswords and zinc oxide nanowires under a room-temperature, dry environment. The surface morphology of the nanostructures, probe tips, and adhesion forces were characterized. Using this process, a nanosword was integrated with a MEMS device to characterize its sensitivity to ultraviolet light. As such, the technique could enable the rapid assembly of individual nanostructures with CMOS-compatible devices.