Micromachined droplet on demand formation with shear mode piezoelectricity and micron size nozzles

Author

Cheng, C.H. ; Jung-Tang Huang ; Yu-Lin Huang ; Hsu, Fu-Chiang ; Wu, Thung-Han ; Li, Ching-Cheng ; Huang, L.-S. ; Chang, Shuo-Hung

Author_Institution

Dept. of Mech. & Autom. Eng., Da-Yeh Univ., Changhua, Taiwan

fYear

2005

fDate

11-15 July 2005

Firstpage

134

Abstract

A micromachined droplet formation by using shear mode piezoelectricity and micron size nozzles is presented. The poling design for the shear mode piezoelectric actuator is achieved by both the analysis and experiment. The nozzle plate with the micro-fluidic channel is fabricated by the COMS process and MEMS post-process. The pressure chamber, immersed micro-fluidic channel and the nozzle plate are fabricated on a single chip. The droplet-on-demand generator with the piezoelectric actuator and the nozzle located on one side of the chip offers planar assembly design for large quantity fabrication with high yield and low cost. The nozzles with diameter of 4 μm were fabricated and 1 μm nozzle behavior was analyzed. Design, analysis and measurements were presented.

Keywords

dielectric polarisation; drops; microfluidics; micromachining; nozzles; piezoelectric actuators; piezoelectricity; 1 micron; 4 micron; COMS process; MEMS post-process; microelectromechanical system; microfluidic channel; micromachined droplet on demand formation; micron size nozzles; nozzle plate fabrication; piezoelectric actuator; planar assembly design; poling design; pressure chamber; shear mode piezoelectricity; Assembly; Biomembranes; Fabrication; Ink jet printing; Liquid crystal displays; Manufacturing processes; Micromechanical devices; Nanoelectromechanical systems; Piezoelectric actuators; Piezoelectricity;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2005. 5th IEEE Conference on

Print_ISBN

0-7803-9199-3

Type

conf

DOI

10.1109/NANO.2005.1500711

Filename

1500711