Title :
Optical MEMS for information technologies
Author_Institution :
Inst. of Ind. Sci., Univ. of Tokyo, Tokyo, Japan
Abstract :
Optical applications take a large portion of today´s MEMS industrial products. Thanks to the combination of optical modulations and micromechanical motions, implementation styles of optical MEMS devices are rich in different styles and approaches. In this paper, we give an overview of our recent R&D on optical MEMS for fiber telecom, fiber endoscope, display, and large area flexible color signage sheet.
Keywords :
display devices; endoscopes; micro-optomechanical devices; micromechanics; optical fibre communication; optical modulation; MEMS industrial products; fiber endoscope; fiber telecom; information technology; large area flexible color signage sheet; micromechanical motion; optical MEMS; optical display; optical modulation; Information technology; Micromechanical devices; Mirrors; Optical attenuators; Optical devices; Optical filters; Optical modulation; Optical refraction; Optical sensors; Optical surface waves; Optical MEMS; display; endoscope; modulation; switch;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285613
