Title :
High-performance quantum-well silicon-germanium bolometers using IC-compatible integration for low-cost infrared imagers
Author :
Forsberg, Fredrik ; Roxhed, Niclas ; Ericsson, Per ; Wissmar, Stanley ; Niklaus, Frank ; Stemme, Göran
Author_Institution :
Microsyst. Technol. Lab., KTH - R. Inst. of Technol., Stockholm, Sweden
Abstract :
This paper reports on the realization and characterization of the very first quantum-well (QW) mono-crystalline Si/SiGe 18times18 pixel infrared bolometer arrays that are manufactured using IC compatible heterogeneous 3D integration on fan-out wafers. This integration process enables bolometer materials on top of CMOS-based integrated circuits that can not be integrated with conventional monolithic deposition techniques. The manufactured bolometer arrays have a negative temperature coefficient of resistance (TCR) of 2.8%/K. Measurements of the 1/f noise showed a higher value than expected for the bolometers. This result can be compared to lower values of noise achieved for samples of the thermistor material and is believed to result from imperfect metal contacts.
Keywords :
1/f noise; CMOS image sensors; Ge-Si alloys; bolometers; infrared detectors; infrared imaging; integrated optoelectronics; quantum well devices; silicon; CMOS-based integrated circuits; IC-compatible integration; Si-SiGe; fan-out wafer; heterogeneous 3D integration; infrared imager; negative temperature coefficient-of-resistance; picture size 18 pixel; quantum-well silicon-germanium bolometer; Bolometers; CMOS integrated circuits; Electrical resistance measurement; Germanium silicon alloys; Infrared imaging; Monolithic integrated circuits; Pulp manufacturing; Quantum wells; Silicon germanium; Temperature; Infrared; SiGe; TCR; bolometer; heterogeneous integration; quantum well;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285617