Title :
Bending effect of Si MOSFETs on flexible plastic substrate
Author :
Kao, H.L. ; Chang, Y.C. ; Lin, B.S. ; Huang, M.H. ; Kao, C.H.
Author_Institution :
Dept. of Electron. Eng., Chang Gung Univ., Taoyuan
Abstract :
By applying ~0.27% tensile strain to the flexible die of a 0.16 mum thin-body (100 mum) Si MOSFET mounted on plastic, the DC characteristics have been improved. The small DC performance degradation of the Si MOSFET transferred to plastic shows the potential of integrating electronics onto plastic. The device performance was improved by flexing the substrate to create stress, which produced a 10.7% enhancement of the saturation drain current and only 0.003 V Vth is lower. The approach has the advantages of flexible electronics on the insulating plastic substrate and low cost.
Keywords :
MOSFET; bending; elemental semiconductors; flexible electronics; silicon; MOSFET; Si; bending effect; flexible electronics; flexible plastic substrate; insulating plastic substrate; saturation drain current; size 0.16 mum; size 100 mum; small DC performance degradation; tensile strain; thin-body; Capacitive sensors; Costs; Degradation; Flexible electronics; MOSFETs; Organic thin film transistors; Plastics; Substrates; Tensile strain; Thin film transistors;
Conference_Titel :
Devices, Circuits and Systems, 2008. ICCDCS 2008. 7th International Caribbean Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-1956-2
Electronic_ISBN :
978-1-4244-1957-9
DOI :
10.1109/ICCDCS.2008.4542621