Title :
Optics and emission imaging of a LaB6 emitter
Author :
Katsap, Victor ; Lai, Chising
Author_Institution :
NuFlare Technol. America, Hopewell Junction, VA, USA
Abstract :
LaB6 cathode is the emitter of choice in electron beam lithography tools. In commercial LaB6 cathodes, the (100) crystalline plane is used as the emissive surface. Typical size of emitter is ~70 μm DIA. Quality control is usually done by observing (100) surface with a powerful microscope. Emission images of the same cathodes often reveal irregularities practically invisible or barely visible neither in optical microscope nor in SEM. We have obtained emission images of the LaB6 cathodes and compared them to optical and SEM images.
Keywords :
cathodes; electron beam lithography; lanthanum compounds; optical microscopes; optics; scanning electron microscopy; LaB6; SEM; cathodes; crystalline plane; electron beam lithography; emission images; emission imaging; emissive surface; emitter; optical microscope; quality control; size 70 mum; Cathodes; Lithography; Microscopy; Optical imaging; Optical microscopy; Stimulated emission; LaB6 cathode; e-beam lithography; emission imaging;
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2015 IEEE International
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-7109-1
DOI :
10.1109/IVEC.2015.7223744
