CMOS based sensors for biochemical analysis

A fully integrated innovative micro system for biochemical analysis is presented. Direct electrical detection by means of an electrochemical method is used. In contrast to state-of-the-art optical methods, this allows for a simple cost-optimized realization of sensor systems with high sensitivity. The system integration is based on a standard CMOS process. Referring to the example of a DNA sensor microarray, the working principle and system architecture are discussed, as well as challenges and benefits of the unique combination of integrated circuitry with transducer materials coated with highly specific molecules.