Title :
High Q factor plate resonators for ultrasensitive mass sensing applications
Author :
Agache, V. ; Cochet, M. ; Blanc, R. ; Baleras, F. ; Caillat, P.
Author_Institution :
DTBS, CEA, Grenoble, France
Abstract :
This paper focuses on the application of a single-crystal silicon (SCS) bulk mode resonators for ultrasensitive mass detection. The mass sensing element is either a square or a disk plate fabricated in SCS, which is driven in the wine glass (WG) mode thanks to an electrostatic coupling. Indeed, compared to flexural beams counterparts, it has higher quality factors, which is desirable for improved mass resolution.
Keywords :
Q-factor; crystal resonators; disk plate; electrostatic coupling; flexural beams; high Q factor plate resonators; single-crystal silicon bulk mode resonators; ultrasensitive mass sensing; wine glass mode; Electrodes; Electrostatics; Glass; Micromechanical devices; Optical resonators; Q factor; Resonance; Resonant frequency; Shape; Thermoelasticity; Mass sensor; Wine glass mode; square & disk plate resonator;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285772
