DocumentCode
1863370
Title
Double-Microcantilever Design for Surface Stress Measurement in Biosensor Introduction
Author
Shih-Ming Yang ; Yin, T.I.
fYear
2005
fDate
2005
Firstpage
201
Lastpage
206
Keywords
Biomedical optical imaging; Biosensors; Capacitive sensors; Extraterrestrial measurements; Optical sensors; Piezoresistance; Pollution measurement; Stress measurement; Surface contamination; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
Print_ISBN
0-7803-9047-4
Type
conf
DOI
10.1109/AIM.2005.1500990
Filename
1500990
Link To Document