DocumentCode :
1863370
Title :
Double-Microcantilever Design for Surface Stress Measurement in Biosensor Introduction
Author :
Shih-Ming Yang ; Yin, T.I.
fYear :
2005
fDate :
2005
Firstpage :
201
Lastpage :
206
Keywords :
Biomedical optical imaging; Biosensors; Capacitive sensors; Extraterrestrial measurements; Optical sensors; Piezoresistance; Pollution measurement; Stress measurement; Surface contamination; Thermal stresses;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
Print_ISBN :
0-7803-9047-4
Type :
conf
DOI :
10.1109/AIM.2005.1500990
Filename :
1500990
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1863370
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