• DocumentCode
    1863370
  • Title

    Double-Microcantilever Design for Surface Stress Measurement in Biosensor Introduction

  • Author

    Shih-Ming Yang ; Yin, T.I.

  • fYear
    2005
  • fDate
    2005
  • Firstpage
    201
  • Lastpage
    206
  • Keywords
    Biomedical optical imaging; Biosensors; Capacitive sensors; Extraterrestrial measurements; Optical sensors; Piezoresistance; Pollution measurement; Stress measurement; Surface contamination; Thermal stresses;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
  • Print_ISBN
    0-7803-9047-4
  • Type

    conf

  • DOI
    10.1109/AIM.2005.1500990
  • Filename
    1500990