Title :
Automatic Mixed-Dimensional MEMS Modeling
Author :
Yi Su ; Chong, C.S.
Keywords :
Analytical models; Biological system modeling; Chemical elements; Computational modeling; Medical simulation; Mesh generation; Microelectromechanical devices; Micromechanical devices; Reduced order systems; Solid modeling;
Conference_Titel :
Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
Print_ISBN :
0-7803-9047-4
DOI :
10.1109/AIM.2005.1500997