Title :
An electromagnetically actuated microspeaker with fully-integrated wax-bonded Nd-Fe-B micromagnets for hearing aid applications
Author :
Je, Sang-Soo ; Wang, Naigang ; Brown, Henry C. ; Arnold, David P. ; Chae, Junseok
Author_Institution :
Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ, USA
Abstract :
We present a fully-integrated, electromagnetically actuated microspeaker intended for hearing aid applications. The microspeaker uses the Lorentz force to actuate multi-turn, multi-layer copper coils embedded in a 3-mm-diameter parylene diaphragm. Process-compatible micromachined permanent magnets are employed for size reduction and batch-manufacturability. The permanent magnets are composed of micro-size Nd-Fe-B particles in a wax binder. The microspeaker produces 0.64 mum peak displacement at 1 kHz for a drive current of 88 mArms (6 Omega coil impedance), corresponding to a 46 mW power consumption.
Keywords :
hearing aids; loudspeakers; permanent magnets; Lorentz force; electromagnetically actuated microspeaker; fully-integrated wax-bonded Nd-Fe-B micromagnets; hearing aid; multilayer copper coils; multiturn copper coils; process-compatible micromachined permanent magnets; Auditory system; Coils; Costs; Energy consumption; Loudspeakers; Magnetic flux; Magnetostatics; Permanent magnets; Power generation; Soft magnetic materials; MEMS; Nd-Fe-B permanent magnet; hearing aids; micromagnets; microspeaker;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285873
