DocumentCode
1864200
Title
Optimal Control Based Active Force Sensing System for Micromanipulation
Author
Winder, E. ; Yantao Shen ; Ning Xi ; Weihua Sheng ; Wejinya, Uchechukwu C. ; Pomeroy, C.A.
fYear
2005
fDate
2005
Firstpage
402
Lastpage
407
Keywords
Atomic force microscopy; Bonding forces; Dynamic range; Electrostatics; Force control; Force measurement; Force sensors; Optimal control; Servomechanisms; Structural beams;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
Print_ISBN
0-7803-9047-4
Type
conf
DOI
10.1109/AIM.2005.1501024
Filename
1501024
Link To Document