Title :
Robustness of electrostatic MEMS actuators against electrical overstress
Author :
De Coster, J. ; Rottenberg, X. ; Sangameswaran, S. ; Ekkels, P. ; Tilmans, H.A.C. ; De Wolf, I.
Author_Institution :
IMEC, Leuven, Belgium
Abstract :
The response of electrostatic actuators to electrical overstress is studied in this paper. More specifically, the use of passive components (resistors and capacitors) to diminish the harmful effects of electrical overstress is demonstrated. The influence of these passives on the normal operation of the devices is also studied.
Keywords :
capacitors; electrostatic actuators; electrostatic discharge; resistors; capacitor; electrical overstress; electrostatic MEMS actuator; passive component; resistor; Earth Observing System; Electrostatic actuators; Electrostatic discharge; Impedance; Microelectromechanical devices; Micromechanical devices; Micromirrors; Resistors; Robustness; Testing; EOS/ESD; MEMS; electrostatic actuator;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285905
