Title :
New polysilicon sensor and actuator technology for the development of a thermal platform
Author :
Marty, B. ; Camps, T. ; Tasselli, J. ; Marty, A. ; Lagrange, D.
Abstract :
This paper reports on a generic approach for the development of polysilicon diodes on glass wafers for thermal sensing and control applications. The capabilities of polysilicon diodes as thermal sensors are demonstrated on glass wafers with good thermal sensitivities about 40 mV/degC. A simple experimental set-up has been developed to evaluate the potentialities of these devices in microfluidics operating conditions. First encouraging results of temperature detection are presented.
Keywords :
microactuators; microfluidics; microsensors; semiconductor diodes; silicon compounds; temperature control; temperature sensors; actuator technology; glass wafer; microfluidics operating condition; polysilicon diodes; polysilicon sensor; temperature detection; thermal control; thermal sensing; Actuators; CMOS technology; Diodes; Fabrication; Glass; Microfluidics; Temperature measurement; Temperature sensors; Thermal sensors; Voltage; Polysilicon diodes; glass wafers; thermal sensors and actuators;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285915
