Abstract :
The following topics are dealt with: medical MEMS; micro and nanofluidics; gyroscopes; photonics; micro-optics; fabrication; power & energy harvesters; acoustic sensors; medical microdevices; magnetic and resonant sensors; cell handling; biosensing; bioMEMS; tactile and force sensors; NEMS-MEMS manufacturing techniques; MEMS-NEMS materials; packaging and assembly; lab-on-chip medical diagnostic devices; biochemical sensors; medical microsystems; nanobiotechnology; fluidic sensors; displacement sensors; gas and chemical sensors; inertial sensors; physical sensor manufacturing techniques; nanoscale physical sensors; sonic and ultrasonic MEMS transducers; electromagnetics transducers; free space optical components and systems; electromagnetic MEMS; RF MEMS components and systems; THz MEMS components and systems; and PowerMEMS and nanoscale actuators.
Keywords :
assembling; bioMEMS; biomedical transducers; biosensors; electromagnetic devices; electronics packaging; energy harvesting; force sensors; gas sensors; lab-on-a-chip; micro-optics; microactuators; microfabrication; microfluidics; microsensors; nanoactuators; nanosensors; tactile sensors; ultrasonic transducers; MEMS-NEMS materials; NEMS-MEMS manufacturing techniques; PowerMEMS; RF MEMS components; RF MEMS systems; THz MEMS components; THz MEMS systems; acoustic sensors; assembly; bioMEMS; biochemical sensors; biosensing; cell handling; chemical sensor; displacement sensors; electromagnetic MEMS; electromagnetics transducers; energy harvesters; fabrication; fluidic sensors; force sensors; free space optical components; free space optical systems; gas sensors; gyroscopes; inertial sensors; lab-on-chip medical diagnostic devices; magnetic sensors; medical MEMS; medical microdevices; medical microsystems; micro-optics; microfluidics; nanobiotechnology; nanofluidics; nanoscale actuators; nanoscale physical sensors; packaging; photonics; physical sensor manufacturing techniques; power harvesters; resonant sensors; sonic MEMS transducers; tactile sensors; ultrasonic MEMS transducers;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7050865
