A 7ppm, 6°/hr frequency-output MEMS gyroscope

Author

Izyumin, Igor I. ; Kline, Mitchell H. ; Yu-Ching Yeh ; Eminoglu, Burak ; Chae Hyuck Ahn ; Hong, Vu A. ; Yushi Yang ; Ng, Eldwin J. ; Kenny, Thomas W. ; Boser, Bernhard E.

Author_Institution

Univ. of California, Berkeley, Berkeley, CA, USA

fYear

2015

fDate

18-22 Jan. 2015

Firstpage

33

Lastpage

36

Abstract

We report the first frequency-output MEMS gyroscope to achieve <;7 ppm scale factor accuracy and <; 6°/hr bias stability with a 3.24mm² transducer. By implementing continuous-time mode reversal in an FM gyro, the rate signal is modulated away from DC, making the system insensitive to the resonant frequency of the transducer. The scale factor is almost entirely ratiometric, depending primarily on the mechanical angular gain factor of the transducer and the accuracy of the timing reference. Scale factor sensitivity to variations in quality factor, electro-mechanical coupling coefficients, and circuit drift is significantly reduced compared to conventional open-loop and force-rebalance operating modes.

Keywords

gyroscopes; microsensors; MEMS gyroscope; circuit drift; continuous-time mode reversal; electro-mechanical coupling coefficients; mechanical angular gain factor; quality factor; transducer; Circuit stability; Frequency modulation; Gyroscopes; Micromechanical devices; Oscillators; Thermal stability; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on

Conference_Location

Estoril

Type

conf

DOI

10.1109/MEMSYS.2015.7050879

Filename

7050879