• DocumentCode
    1868993
  • Title

    Novel ionic liquid - polymer composite and an approach for its patterning by conventional photolithography

  • Author

    Bakhtina, Natalia A. ; Voigt, Anja ; MacKinnon, Neil ; Ahrens, Gisela ; Gruetzner, Gabi ; Korvink, Jan G.

  • Author_Institution
    IMTEK - Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
  • fYear
    2015
  • fDate
    18-22 Jan. 2015
  • Firstpage
    97
  • Lastpage
    101
  • Abstract
    A novel crosslinkable, conductive, highly transparent composite material based on a photoresist and an ionic liquid (the names of the composites are not announced here due to the current procedure of patenting) is presented. The composite possesses a good and stable ionic conductivity (up to 10 mS cm-1 at room temperature) over a wide frequency bandwidth (1 kHz - 1 MHz) and is optically transparent (transmission value of 90 % for a 170 μm thick film). In addition, an approach for the patterning of the composite material by conventional photolithography with a good spatial resolution (line width of 20 - 30 μm) is introduced. The unique properties of the material are utilized for time- and cost-saving direct manufacturing of electrically conductive, highly transparent microcomponents.
  • Keywords
    filled polymers; ionic conductivity; optical materials; photoresists; bandwidth 1 kHz to 1 MHz; crosslinkable conductive highly transparent composite material; distance 20 m to 30 m; electrically conductive manufacturing; ionic conductivity; ionic liquid-polymer composite; patenting procedure; patterning; photolithography; photoresist; size 170 m; temperature 293 K to 298 K; transparent microcomponent; Composite materials; Liquids; Optical device fabrication; Optical films; Polymers; Resists;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
  • Conference_Location
    Estoril
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2015.7050895
  • Filename
    7050895