Title :
Micro fluidic chamber with thin Si windows for observation of biological samples in vacuum
Author :
Hayashi, Hideki ; Toda, Masaya ; Ono, Takahito
Author_Institution :
Grad. Sch. of Eng., Tohoku Univ., Sendai, Japan
Abstract :
A micro fluidic chamber with 178 nm-thick single crystal Si windows on a micro channel has been developed. Because of these thin windows, the aquatic sample inside of the channel can be observed by scanning electron microscopy. Secondary electrons from a sample in the channel are able to be detected in vacuum with an acceleration voltage of 15 kV, where the emission current is 75 μA. The micro fluidic chamber is possibly applied to cell imaging via the Si thin window in vacuum using magnetic resonance force microscopy.
Keywords :
bioMEMS; biomedical MRI; cellular biophysics; microchannel flow; microfabrication; scanning electron microscopy; silicon; Si; aquatic sample; biological samples; cell imaging; current 75 muA; magnetic resonance force microscopy; microchannel fabrication; microfluidic chamber; scanning electron microscopy; secondary electrons; silicon thin window; size 178 nm; voltage 15 kV; Acceleration; Charge carrier processes; Fluidic microsystems; Glass; Microfluidics; Scanning electron microscopy; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7050959
