Title :
Mechanical characterization of thin films using a MEMS device inside SEM
Author :
Changhong Cao ; Chen, Brandon ; Filleter, Tobin ; Yu Sun
Author_Institution :
Univ. of Toronto, Toronto, ON, Canada
Abstract :
A MEMS device was developedfor mechanical characterization of 2D ultra-thin films. The device utilizes electrothermal actuators to apply uniaxial tension. The robust design makes the device capable of withstanding both dry and wet transfer of 2D ultra-thin film materials onto the suspended structures of the device. Fracture stress of thin graphene oxide (GO) films was measured.
Keywords :
actuators; fracture; graphene; internal stresses; micromechanical devices; scanning electron microscopy; thin films; 2D ultra-thin films; CO; MEMS device; SEM; dry transfer; electrothermal actuators; fracture stress; mechanical characterization; suspended structures; thin graphene oxide films; uniaxial tension; wet transfer; Actuators; Fabrication; Films; Graphene; Micromechanical devices; Stress; Testing;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on
Conference_Location :
Estoril
DOI :
10.1109/MEMSYS.2015.7050969
