Title :
Effect of cumulative heating on micromachining in the explosive ablation regime with copper vapour lasers
Author :
Fishburn, J.M. ; Kapitan, D. ; Withford, M.J. ; Brown, D.J.W. ; Piper, J.A.
Author_Institution :
Sch. of Math., Macquarie Univ., North Ryde, NSW, Australia
Abstract :
Summary form only given. Micromachining of metals using high pulse repetition frequency (PRF/spl sime/10-20 kHz) copper vapour lasers (CVLs) at fluences of order 10/sup 2/-10/sup 3/ J/cm/sup 2/ is observed to produce a larger (average) ablation depth per pulse with increasing PRF, which we attribute to cumulative heating effects. The paper explains this high fluence ablation regime in the context of an explosive ablation model, which also explains observed deep, conical shaped, singleshot ablation craters with depths 10-70 /spl mu/m. To the purpose the characteristics of ablation craters (depth, morphology) produced by single-shot exposures with and without external heating of the substrate, are compared to those obtained by multiple pulse experiments.
Keywords :
copper; gas lasers; heating; laser ablation; laser beam effects; laser beam machining; metals; micromachining; 10 to 20 kHz; Cu; Cu vapour lasers; ablation craters; ablation depth; cumulative heating; cumulative heating effects; deep conical shaped singleshot ablation craters; depth; explosive ablation model; explosive ablation regime; external heating; high fluence ablation regime; high pulse repetition frequency; metals; micromachining; morphology; multiple pulse experiments; single-shot exposures; substrate; Context modeling; Copper; Explosives; Frequency; Heating; Laser ablation; Micromachining; Morphology; Optical pulses; Pulsed laser deposition;
Conference_Titel :
Lasers and Electro-Optics, 1999. CLEO '99. Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-595-1
DOI :
10.1109/CLEO.1999.834304
