Title :
Field emission enhanced semiconductor thermoelectric cooler
Author :
Weiss, Brock L. ; Cutler, P.H. ; Miskovsky, N.M. ; Chung, Nicholas M MiskovskyMoon ; Kumar, Nalin
Author_Institution :
Dept. of Phys., Pennsylvania State Univ., Altoona, PA, USA
Abstract :
Initial experimental results on the fabrication and measurements of a prototype field emission enhanced thermoelectric cooler device is reported. The device is based upon a silicon needle arrays fabricated by a focused ion beam technique. The device uses an electric field modulated current to transport heat from a cold source to a hot source via n- and p-type carriers. Cooling measurements are carried out in UHV system using both thermocouple and optical thermometry.
Keywords :
cooling; electron field emission; elemental semiconductors; focused ion beam technology; prototypes; semiconductor devices; silicon; thermoelectricity; UHV system; electric field modulated current; field emission enhanced semiconductor thermoelectric cooler; focused ion beam technique; heat transport; n-type carriers; optical thermometry; p-type carriers; silicon needle arrays; thermocouple; Cooling; Fabrication; Ion beams; Needles; Particle beam optics; Prototypes; Resistance heating; Silicon; Thermoelectric devices; Thermoelectricity;
Conference_Titel :
Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International
Print_ISBN :
0-7803-8397-4
DOI :
10.1109/IVNC.2004.1354964
