DocumentCode
1876013
Title
FEA image sensor with electron-beam focusing system
Author
Egami, N. ; Nanba, M. ; Takiguchi, Y. ; Osada, K. ; Watabe, T. ; Okazaki, S. ; Obara, Y. ; Tanaka, M. ; Itoh, S.
Author_Institution
NHK Sci. & Tech. Res. Labs., Tokyo, Japan
fYear
2004
fDate
11-16 July 2004
Firstpage
228
Lastpage
229
Abstract
A 256×192 pixel FEA image sensor with an electron-beam focusing system was fabricated and tested. The experimental results revealed that the sensor could obtain sufficient resolution for its pixel size of 50×50 μm by focusing the electron beam emitted from the FEA onto a photoconductive target, demonstrating its potential as a practical image sensor with small pixels.
Keywords
electron beam focusing; field emitter arrays; image resolution; image sensors; FEA image sensor; electron-beam focusing system; field emitter array; photoconductive target; pixel size; resolution; Electrodes; Electron beams; Focusing; Image sensors; Magnetic flux; Magnetic sensors; Photoconductivity; Pixel; Prototypes; Sensor systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International
Print_ISBN
0-7803-8397-4
Type
conf
DOI
10.1109/IVNC.2004.1354987
Filename
1354987
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