DocumentCode :
1876400
Title :
Micro/Nano Pattern Fabrication Using Ultrafast Laser Surface Modification and Self-Assembled Monolayers
Author :
Chang, W.S. ; Huh, K.S. ; Cho, S.H. ; Kim, J.G. ; Whang, K.H.
Author_Institution :
Nano-Mechanical Systems Research Center, KIMM, Daejeon, KOREA, Phn +82-42-868-7134; Fax +82-42-868-7149; E-mail: paul@kimm.re.kr
fYear :
2006
fDate :
2006
Firstpage :
322
Lastpage :
325
Abstract :
Self-assembled monolayers (SAMs) have important potential industrial applications, such as in sensors, transducers, detectors, packaging, and insulating layers for integrated circuits. In this study, electrostatic interaction is utilized to direct the patterning of a gold substrate on thiolate group (-SH) functionalized surfaces. We achieved direct laser writing of photopatterns with a feature width of several hundred nanometers on gold surfaces. SAMs of alkanethiols were formed on a gold substrate and modified by a femtosecond laser to create patterns of hydrophobic alkyl and hydrophilic thiol, carboxyl, and carbonyl groups. Employing a novel approach to nanofabrication by utilizing a femtosecond laser, gold nanoparticles were fabricated onto gold surfaces to create two-dimensional (2D) nanoparticle arrays.
Keywords :
Application specific integrated circuits; Detectors; Gold; Insulation; Integrated circuit packaging; Nanoparticles; Optical device fabrication; Self-assembly; Surface emitting lasers; Transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location :
Istanbul, Turkey
ISSN :
1084-6999
Print_ISBN :
0-7803-9475-5
Type :
conf
DOI :
10.1109/MEMSYS.2006.1627801
Filename :
1627801
Link To Document :
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