Title :
Practical High-Speed Metal-Based Optical Microscanning Devices with Low Production Cost
Author :
Park, Jae-Hyuk ; Akedo, Jun ; Sato, Harumichi ; Lebedev, Maxim
Author_Institution :
National Institute of Advanced Industrial Science and Technology (AIST), JAPAN
Abstract :
Practical high-speed metal-based optical microscanning devices with low production cost and simple fabrication process were successfully fabricated by direct deposition of piezoelectric materials using the aerosol deposition method (ADM) onto the micro-structured metal scanner frame. Large optical scanning angle of 35 ° at high resonance frequency of 23.6 kHz was achieved in ambient air without vacuum package.
Keywords :
Aerosols; Costs; High speed optical techniques; Optical device fabrication; Optical devices; Packaging; Piezoelectric materials; Production; Resonance; Resonant frequency;
Conference_Titel :
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Conference_Location :
Istanbul, Turkey
Print_ISBN :
0-7803-9475-5
DOI :
10.1109/MEMSYS.2006.1627903
