Consideration for a New Micromachined Accelerometer Capacitive Interface Based on Switched Flip-Flop Circuit

Author

Kollár, Martin ; Michaeli, Linus

Author_Institution

Dept. of Electr. Eng. & Meas., Tech. Univ. of Kosice

fYear

2006

fDate

24-27 April 2006

Firstpage

513

Lastpage

518

Abstract

In this paper, a new interface concept is described for the design of a closed-loop accelerometer based upon micromachined capacitive sensing element. In comparison to the ordinary approaches, the new interface only consists of a switched flip-flop circuit. The interface circuit is low in component count, which makes it particularly suitable for prototype evaluation. The theoretical considerations agree well with the simulation results in Matlab SIMULINK and experimental results

Keywords

accelerometers; capacitive sensors; flip-flops; micromachining; microsensors; switching circuits; Matlab SIMULINK; capacitive interface; closed-loop accelerometer; interface circuit; micromachined accelerometer; micromachined capacitive sensing element; sigma-delta modulator; switched flip-flop circuit; Accelerometers; Delta-sigma modulation; Electric shock; Electrodes; Electrostatics; Flip-flops; Force feedback; Prototypes; Switching circuits; Voltage; Micromachined accelerometer; interface circuit; sigma-delta modulator; switched flip-flop;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 2006. IMTC 2006. Proceedings of the IEEE

Conference_Location

Sorrento

ISSN

1091-5281

Print_ISBN

0-7803-9359-7

Electronic_ISBN

1091-5281

Type

conf

DOI

10.1109/IMTC.2006.328553

Filename

4124379